Electron Grade Trifluoromethane

• CAS No.: 75-46-7
• Formula: CHF3
• EINECS: 200-872-4
• Constituent: Industrial Pure Air
• Grade Standard: Electronic Grade
• Chemical Property: Colorless Gas
• Model NO.: CHF3
• Purity: N5.0
• Cylinder Spec: 44L / 47L
• Fill Contens (20˚c): 32kg / 32kg
• Fill Pressure (20˚c,-5%): 41.8 Bar
• Valve Type: Diss 716
• Transport Package: Cylinder
• Specification: 44L / 47L 32kg / 32kg
• Trademark: kaimei
• Origin: Suzhou, China
• HS Code: 2811299000
• Production Capacity: 600t/Year

Product Description

Trifluoromethane:also known as trifluoromethane, is a colorless, odorless, nonconductive gas that is an ideal substitute for halides.

Product Specifications
 

Product Name	Trifluoromethane
Type	CHF3
Purity	n5.0
Cylinder Spec	44L / 47L
Fill contens (20?C)	32kg / 32kg
Fill pressure (20?C,-5%)	41.8 bar
Valve type	DISS 716
Applications	Semiconductor: Plasma etching gas, used in plasma dry etching process, low-temperature refrigerant.

Company Information

Jiangsu Kaimei Electronic Materials  Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineeringservices to our customers in Chinaand worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers toprovide support, solutions and quality products that are innovative,reliable, and safe.Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas,  SiH4, Sih2cl2, SiHCL3, SiCL4,
NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.

Package Type