Product Descriptions:
Tungsten(VI) fluoride, also known as tungsten hexafluoride, is an inorganic compound with the formula WF6. It is a toxic, corrosive, colorless gas, with a density of about 13 g/L (roughly 11 times heavier than air.
Product Spec:
Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
The COA of Product:
Test items |
Units |
Quality requirements |
Test results |
CF4 |
ppm |
<0.5 |
<0.01 |
O2 |
ppm |
<0.5 |
<0.01 |
N2 |
ppm |
<1 |
0.03 |
CO |
ppm |
<0.5 |
<0.02 |
CO2 |
ppm |
<0.5 |
<0.01 |
SiF4 |
ppm |
<0.5 |
<0.1 |
SF6 |
ppm |
<0.5 |
<0.1 |
HF |
ppm |
<5 |
0.19 |
Al |
ppb |
≤10 |
<0.020 |
As |
ppb |
≤10 |
<0.001 |
B |
ppb |
≤10 |
<0.005 |
Ca |
ppb |
≤5 |
<0.200 |
Cd |
ppb |
≤2 |
<0.001 |
Cr |
ppb |
≤10 |
<0.020 |
Fe |
ppb |
≤10 |
<0.007 |
K |
ppb |
≤5 |
<0.100 |
Mn |
ppb |
≤10 |
<0.001 |
Na |
ppb |
≤5 |
<0.040 |
Th |
ppb |
≤0.1 |
<0.001 |
Ti |
ppb |
≤10 |
<0.002 |
Li |
ppb |
≤10 |
<0.002 |
U |
ppb |
≤0.05 |
<0.001 |
Zn |
ppb |
≤10 |
<0.005 |
Si |
ppb |
≤10 |
<0.100 |
Pb |
ppb |
≤10 |
<0.001 |
P |
ppb |
≤2 |
<0.300 |
Mg |
ppb |
≤10 |
<0.020 |
Ni |
ppb |
≤20 |
<0.030 |
Cu |
ppb |
≤5 |
<0.005 |
Mo |
ppb |
≤10 |
<0.001 |
Total impurities of other metal |
ppb |
≤500 |
<0.0010 |
Company Information:
Jiangsu Kaimei Electronic Materials Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
Package of the product: