Product Descriptions
Dichlorosilane is a silicon precursor for epitaxial silicon, silicon germanium, silicon nitride,
silicon oxide, silicon carbide and metal silicide thin films.
Details
| Product Name |
Dichlorosilane |
| Type |
SiH2Cl2 |
| Purity |
n3.0 |
| Cylinder Spec |
40L |
| Fill contens(20?C) |
37kg |
| Valve type |
DISS636 |
| Applications |
Semiconductor: Used in the production of epitaxial tablets, optical fiber important raw materials, directly affect the performance of integrated circuits, integration, yield. |
Product Specification
| Items |
Compositions |
Symbols |
Value |
Units |
| Purity(GC) |
SiH2Cl2 |
≥ |
99.9 |
% |
| Gas impurities |
O2+Ar |
≤ |
1 |
ppm |
| N2 |
≤ |
1 |
ppm |
| CO |
≤ |
1 |
ppm |
| CO2 |
≤ |
1 |
ppm |
| Donor impurities |
P |
≤ |
0.20 |
ng/g |
| As |
≤ |
0.05 |
ng/g |
| Acceptor impurities |
B |
≤ |
0.20 |
ng/g |
| Al |
≤ |
0.10 |
ng/g |
| Metal impurities |
Cr |
≤ |
0.50 |
ng/g |
| Fe |
≤ |
1.00 |
ng/g |
| Ni |
≤ |
0.50 |
ng/g |
| Cu |
≤ |
0.50 |
ng/g |
| Zn |
≤ |
0.50 |
ng/g |
| Co |
≤ |
0.20 |
ng/g |
| Na |
≤ |
0.50 |
ng/g |
Package type
Company information
Suzhou Xunhe Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
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