Product Information
Hydrogen bromide is used in combination with hydrogen chloride and chlorine for plasma etching of polysilicon as STI /Silicon fin etch in FinFET or Trigate, silicon gate stack etch, and small diameter TSV etch.
Product Specification
| Product name |
Hydrogen bromide |
| Type |
HBr |
| Purity |
n5.0 |
| Cylinder Spec |
10L / 47L |
| Fill contens (20?C) |
10kg / 50kg |
| Fill pressure (20?C,-5%) |
23 bar |
| Valve type |
DISS 634 |
| Applications |
Semiconductor: gas phase etching gas. |
Package type
Company information
Jiangsu Kaimei Electronic Material Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
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