• High Purity 99.999% 5n Sulfur Hexafluoride Gas
  • High Purity 99.999% 5n Sulfur Hexafluoride Gas
  • High Purity 99.999% 5n Sulfur Hexafluoride Gas
  • High Purity 99.999% 5n Sulfur Hexafluoride Gas
  • High Purity 99.999% 5n Sulfur Hexafluoride Gas

High Purity 99.999% 5n Sulfur Hexafluoride Gas

CAS No.: 7783-82-6
Formula: Sf6
EINECS: 7783-82-6
Constituent: Industrial Pure Air
Grade Standard: Industrial Grade
Chemical Property: Poisonous Gases
Customization:
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Basic Info.

Model NO.
SF6
Transport Package
Cylinder
Specification
20L, 40L, 470L, Y-Cylinder
Trademark
kaimei
Origin
Suzhou
HS Code
2812190091
Production Capacity
1000t/Year

Product Description

Sulfur hexafluoride is used for plasma etching prior to chemical vapor deposition (CVD). Its uses include oxide etching, nitride etching, and wafer cleaning. Sulfur hexafluoride is also used in plasma chamber cleaning processes.

Specifications:
 
Product name Sulfur hexafluoride 
Type SF6
Purity  n5.0
Cylinder Spec  47L / 470L
Fill contens (20?C) 50kg / 500kg
Fill pressure (20?C,-5%) 23 bar
Valve type DISS 716
Applications The semiconductor field is used in the chemical vapor deposition process,because of high resistance at high voltages, as an insulating agent for electrical equipment, leak detection gas, 
and Sause spectrometer in the laboratory.

Package Details:
 
Purity(SF6) Package Capacity
99.995%,
99.999%
40L/50kg(cylinder) 2500 tons to 7000tons per year 
.
440L/500kg(cylinder)
600L/600kg(cylinder)
ISO Tank/13000kg

Package type:


High Purity 99.999% 5n Sulfur Hexafluoride GasHigh Purity 99.999% 5n Sulfur Hexafluoride GasHigh Purity 99.999% 5n Sulfur Hexafluoride Gas
High Purity 99.999% 5n Sulfur Hexafluoride GasHigh Purity 99.999% 5n Sulfur Hexafluoride GasHigh Purity 99.999% 5n Sulfur Hexafluoride GasHigh Purity 99.999% 5n Sulfur Hexafluoride GasHigh Purity 99.999% 5n Sulfur Hexafluoride Gas

 

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Gold Member Since 2018

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Trading Company
Number of Employees
7
Year of Establishment
2016-08-18